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| Home > Products > Producer |
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| Innosys
can supply fully refurbished systems and chambers
for PVD, CVD and etch applications on Endura, Centura, Producer and P-5000 platforms.
Below is a partial list of the processes and chamber configurations supported by Innosys. |
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| PE
Silane Oxide/ Nitride |
| SA
BPSG/ HTUSG |
| SA
BPSG/ HTUSG |
| SA
High Aspec Ratio Gap Fill |
| Advanced
Patterned Film |
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| 200~300mm
size |
| Multi
Slots Load Locks |
| SMIF
Interface |
| VHP
Robots |
| Fast
Wafer Mapping |
| Buffer Lid
Hoist |
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2345 Bering
Drive, San Jose, CA, 95131 Tel: 408.324.0385 Fax: 408.324.0390
© 2007 Innosys Technologies Inc. All rights reserved. |
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