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| Home > Products > P-5000s |
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| Innosys
can supply fully refurbished systems and chambers
for PVD, CVD and etch applications on Endura, Centura, Producer and P-5000 platforms.
Below is a partial list of the processes and chamber configurations supported by Innosys. |
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| BPTEOS, Silane Oxide/Nitride |
| Tungsten CVD, WSiX |
| Sputter Oxide, Poly or Metal Etch |
| Strip |
| Sputter Oxide, Poly or Metal Etch |
| RTP/RTA |
| IPS Dielectric Etch |
| High Density Plasma Dielectric Etch |
| Titanium Tungsten (TiW) |
| DPS |
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| 150mm
- 200mm size |
| Wide or Narrow Body Load Locks |
| Standard or Extended System Controller |
| Through-the-Wall, Ballroom Style or SMIF Interface |
| HP, HP+ or VHP Robots |
| Fast Wafer Mapping |
| Buffer / Transfer Lid Hoist |
| Cool Down, Pass-Thru Orienters |
| 208Vac, 50 or 60Hz top feed
or bottom |
| Single or Dual Orienter |
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| DxZ Chamber |
| WxZ, WxL |
| MxP, MxP+ |
| PASP,PRSP |
| eMxP+ |
| Radiance |
| IPS |
| Ultima,Ultima Plus, Ultima X |
| TxZ |
| DPS, DPS+ |
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2345 Bering
Drive, San Jose, CA, 95131 Tel: 408.324.0385 Fax: 408.324.0390
© 2007 Innosys Technologies Inc. All rights reserved. |
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