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| Home > Products > Enduras |
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| Innosys
can supply fully refurbished systems and chambers
for PVD, CVD and etch applications on Endura, Centura, Producer and P-5000 platforms.
Below is a partial list of the processes and chamber configurations supported by Innosys. |
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| Standard
Aluminum (Al) |
| Planarized Hot Aluminum |
| Hot
Aluminum High Temp High Uniformity |
| Standard
Titanium (Ti) |
| Titanium Nitride (TiN) |
| Coherent Titanium (Co-Ti) |
| Titanium Coherent Titanium / Titanium Nitride. |
| Cobalt |
| Titanium / Titanium Nitride (TTN) |
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| 150mm
- 200mm size |
| Wide
or Narrow Body Load Locks |
| Standard
or Extended System Controller |
| Through-the-Wall,
Ballroom Style or SMIF Interface |
| HP,
HP+ or VHP Robots |
| Fast
Wafer Mapping |
| Buffer
/ Transfer Lid Hoist |
| Cool
Down, Pass-Thru Orienters |
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| Standard
Body Chamber |
| Wide
Body PVD Chamber |
| Standard
Body Water Cooled PVD Chamber |
| Paste
Chamber (Ch-5) |
| Preclean
I / II chamber |
| Orienter
/ Degas Chamber |
| PVD
High Temp Degas Chamber |
| Copper
Barrier Seed |
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2345 Bering
Drive, San Jose, CA, 95131 Tel: 408.324.0385 Fax: 408.324.0390
© 2007 Innosys Technologies Inc. All rights reserved. |
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